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[ENG] Powder · Coreshell

iPV DX3

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Writer 관리자 작성일22-10-11 16:27 View288

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     iPV DX3 

 

      • Powder ALD 

      • Powder loading vol.: 2L
      • Process temperature Max.< 300℃
      • 4 sets of metal organic precusor delivery lines
      • 1 set of liquid reactant delivery lines
      • Single special gas reactant delivery lines.
      • PC base control
      • Automated Reactor handing