iOV MX12
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Writer 관리자 작성일24-02-14 14:17 View62관련링크
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iOV MX12
• (PE) ALD Cluster system
• Reactor size : 12” 4 Slot Cluster
• Shower head type
• Substrate shape : wafer
• Process temperature Max.< 320℃
• 2 sets of metal organic precursor delivery lines
• O3 reactant gas delivery line.
• Rotational Susceptor
• PC base control (iSAC iOV Control Pro TM)
• Automated wafer handling system