iPV DX3
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작성자 관리자 작성일22-05-26 13:50 조회565회관련링크
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iPV DX3
• Powder ALD
• Powder loading vol.: 2L
•
Process temperature Max.< 300℃
• 4 sets of metal organic precusor delivery lines
• 1 set of liquid reactant delivery lines
• Single special gas reactant delivery
lines.
• PC
base control
• Automated Reactor handing