iOV MX8
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작성자 관리자 작성일22-08-22 15:26 조회1,023회관련링크
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iOV MX8
• (PE) ALD Cluster system
• Reactor size : 8” 4 Slot Cluster
• Showerhead type
• Substrate shape : wafer
• Process temperature Max.< 320℃
• 2 sets of metal organic precusor delivery lines
• O3 reactant gas delivery line.
• Rotational Susceptor
• PC base control (iSAC iOV Control Pro TM)
• Automated wafer handling system