iOV MX4
페이지 정보
작성자 관리자 작성일22-06-15 08:53 조회1,012회관련링크
본문
iOV MX4
• (PE) ALD Cluster system
• Reactor size : 4” 5 Slot Cluster
• Substrate shape : wafer
• Process temperature Max.< 320℃
• Single precusor delivery line (ARS Base).
• O3 reactant gas delivery line.
• Rotational Susceptor
• PC base control (iSAC iOV Control Pro TM)
• Automated wafer handing