iOV CX3 with In-situ Analyzers
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작성자 관리자 작성일22-05-26 13:34 조회723회관련링크
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iOV CX3 with In-situ Analyzers
• (PE) ALD, Coupon Chamber(FTIR)
• XPS, FT-IR, Ellipsometer, QCM, QMS etc.
• Reactor size : 8”, 20 x 20 mm glass
• Substrate shape : Wafer, rectangular glass
• Process temperature Max.< 540℃
• 4 sets of metal organic precusor delivery lines
• 1 set of liquid reactant delivery lines
• Up to 4 sets of special gas reactant delivery lines.
• PC base control (iSAC iOV Control Pro TM)
• Automated wafer handing