ENG

제품소개

개인정보처리방침

닫기

이메일무단수집거부

닫기
Semiconductor · LED

iOV CX3 with In-situ Analyzers

페이지 정보

작성자 관리자 작성일22-05-26 13:34 조회747회

본문

     iOV CX3 with In-situ Analyzers 


      • (PE) ALD, Coupon Chamber(FTIR)
      • XPS, FT-IR, Ellipsometer, QCM, QMS etc.
      • Reactor size : 8”, 20 x 20 mm glass
      • Substrate shape : Wafer, rectangular glass
      • Process temperature Max.< 540℃
      • 4 sets of metal organic precusor delivery lines
      • 1 set of liquid reactant delivery lines
      • Up to 4 sets of special gas reactant delivery lines.
      • PC base control (iSAC iOV Control Pro TM)
      • Automated wafer handing